Imec uses various lithography scanners and metrology tools in its 300mm cleanroom, all interconnected through a specialized data platform. This platform supports essential software applications aimed at increasing productivity, optimizing yield and pattern formation, stabilizing overlay and focus, and centrally storing process and metrology data. The current platform, the Litho Control Platform (LCP), has been formally declared “end of service” and must be replaced by the Virtual Compute Platform (VCP). This upgrade is technically necessary to ensure the continuity, support, and future scalability of the existing installations.

2025IDxVCP - 1

Virtual Compute Platform