Supply, delivery, installation, commissioning and integration of a semi-automatic wafer prober system for the electrical and temperature-dependent characterization of 200 mm wafers. The system shall support DC and pulsed I-V as well as low-frequency impedance measurements up to 10 MHz and shall be integrated with the existing Keithley 4200A-SCS characterization system. The scope includes the prober, temperature-controlled chuck, electrical probes, optical and camera systems, control hardware and software, cabling and interfaces, installation, commissioning, operator training and integration support.

Semi-automatic prober for characterization of 200 mm wafers

The procurement comprises the supply, delivery, installation, commissioning and integration of a semi-automatic wafer prober system for the electrical and temperature-dependent characterization of 200 mm wafers. The system shall be suitable for DC and pulsed I-V measurements as well as low-frequency impedance measurements up to 10 MHz and shall be capable of integration with the existing Keithley 4200A-SCS characterization system. The scope of supply includes, in particular, a shielded prober chamber with temperature-controlled chuck (-60 °C to +300 °C), six electrical Kelvin probes with triaxial FORCE/SENSE interfaces, automated microscope and camera systems, anti-vibration table, hardware and software control, PC and displays, all required cabling and interfaces, as well as installation, commissioning, integration support, operator training and technical documentation. The supplier shall provide a complete and fully functional system, including all components, interfaces, accessories and services required for proper operation and successful integration into the existing measurement environment.