The subject matter of this contract is the supply and installation of scientific equipment and components to INL, listed below and detailed in Schedule V attached to these Standard Specifications (from now on referred to as ‘Specifications’). The equipment listed in Schedule V are the lots that the tender comprises. Tenderers may bid for one or more lots. The subject matter of the contract, in all cases, does not include so-called refurbished scientific instruments and equipment. The single lot comprising the tender is as follows: Supply, installation, commissioning, acceptance testing and training of a high-performance Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) system intended for micro- and nanofabrication.

Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) system

Detailed specifications in the procurement documents